http://arxiv.org/abs/2012.07692
Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100\deg C, 250\deg C and 350\deg C. The measured void volume fraction, hydrogen content, microstructure parameter, and bond-angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below $10^{-5}$ for a resonator energy of $10^5$ photons, at 120 mK and 4-7 GHz. This makes these films promising for microwave kinetic inductance detectors and on-chip millimeter-submilimeter filters.
B. Buijtendorp, J. Bueno, D. Thoen, et. al.
Tue, 15 Dec 20
51/136
Comments: Presented at the SPIE Astronomical Telescopes + Instrumentation 2020. Full published paper, poster and video available at this https URL