http://arxiv.org/abs/1710.11255
Kinetic Inductance Detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the $O(500,000)$ detectors needed for the upcoming Cosmic Microwave Background – Stage 4 (CMB-S4) experiment. We have fabricated antenna-coupled MKID array in the 150GHz band optimized for CMB detection. Our design uses a twin slot antenna coupled to inverted microstrip made from a superconducting Nb/Al bilayer and SiN$_x$, which is then coupled to an Al KID grown on high resistivity Si. We present the fabrication process and measurements of SiN$_x$ microstrip resonators.
Q. Tang, P. Barry, R. Thakur, et. al.
Wed, 1 Nov 17
59/63
Comments: 7 pages, 9 figures, submitted to Journal of Low Temperature Physics